Qualitative elemental analysis The DektakXT stylus surface profiler is a state-of-the-art instrument equipped with complete measurement and analysis software. It can measure layer thicknesses and step heights of thin and thick layer samples. The DektakXT system is also capable of measuring the topography and waviness, as well as the roughness of a surface down to the nanometer (nm) range. In addition to the measurements of two-dimensional surface profiles, three-dimensional analyses can also be performed.
 A diamond tip stylus is in contact with the sample surface. The sample and sample stage are moved laterally as the tip translates vertically to measure vertical variations from <1 nm to 1 mm.